Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8056500 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Agus Sofian Tjandra, Robert Navasca, Mehran Behdjat +3 more | 2011-11-15 |
| 8043981 | Dual frequency low temperature oxidation of a semiconductor device | Kai Ma, Christopher S. Olsen | 2011-10-25 |
| 7972441 | Thermal oxidation of silicon using ozone | Sundar Ramamurthy, Vedapuram S. Achutharaman, Cory Czarnik, Mehran Behdjat, Christopher S. Olsen | 2011-07-05 |
| 7951728 | Method of improving oxide growth rate of selective oxidation processes | Norman L. Tam, Balasubramanian Ramachandran, Martin John Ripley | 2011-05-31 |
| 7947561 | Methods for oxidation of a semiconductor device | Rajesh Mani, Norman L. Tam, Timothy Weidman | 2011-05-24 |