Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972441 | Thermal oxidation of silicon using ozone | Yoshitaka Yokota, Sundar Ramamurthy, Cory Czarnik, Mehran Behdjat, Christopher S. Olsen | 2011-07-05 |
| 7964418 | Real time process monitoring and control for semiconductor junctions | Wen Chang, Tarpan Dixit, Philip Allan Kraus | 2011-06-21 |