Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8056500 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Agus Sofian Tjandra, Robert Navasca +3 more | 2011-11-15 |
| 7986871 | Processing multilayer semiconductors with multiple heat sources | Andreas Hegedus, Randhir P. S. Thakur | 2011-07-26 |
| 7972441 | Thermal oxidation of silicon using ozone | Yoshitaka Yokota, Vedapuram S. Achutharaman, Cory Czarnik, Mehran Behdjat, Christopher S. Olsen | 2011-07-05 |
| 7923660 | Pulsed laser anneal system architecture | Alexander Lerner, Timothy N. Thomas | 2011-04-12 |