Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043981 | Dual frequency low temperature oxidation of a semiconductor device | Kai Ma, Yoshitaka Yokota | 2011-10-25 |
| 7972441 | Thermal oxidation of silicon using ozone | Yoshitaka Yokota, Sundar Ramamurthy, Vedapuram S. Achutharaman, Cory Czarnik, Mehran Behdjat | 2011-07-05 |
| 7972933 | Method of selective nitridation | Johanes S. Swenberg, Udayan Ganguly, Theresa Kramer Guarini, Yonah Cho | 2011-07-05 |
| 7910497 | Method of forming dielectric layers on a substrate and apparatus therefor | Tejal Goyani, Johanes F. Swenberg | 2011-03-22 |
| 7902018 | Fluorine plasma treatment of high-k gate stack for defect passivation | Philip Allan Kraus, Khaled Ahmed | 2011-03-08 |
| 7888217 | Method for fabricating a gate dielectric of a field effect transistor | Thai Cheng Chua, Cory Czarnik, Khaled Ahmed, Philip Allan Kraus | 2011-02-15 |
| 7863193 | Integrated circuit fabrication process using a compression cap layer in forming a silicide with minimal post-laser annealing dopant deactivation | Yi Ma, Philip Allan Kraus, Khaled Ahmed, Abhilash J. Mayur | 2011-01-04 |