Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8008166 | Method and apparatus for cleaning a substrate surface | Errol Antonio C. Sanchez, David K. Carlson, Roisin L. Doherty | 2011-08-30 |
| 7972933 | Method of selective nitridation | Christopher S. Olsen, Udayan Ganguly, Theresa Kramer Guarini, Yonah Cho | 2011-07-05 |