Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8008166 | Method and apparatus for cleaning a substrate surface | Johanes S. Swenberg, David K. Carlson, Roisin L. Doherty | 2011-08-30 |
| 7976634 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Satheesh Kuppurao, Howard Beckford, Herman Diniz, Kailash Kiran Patalay +4 more | 2011-07-12 |
| 7972663 | Method and apparatus for forming a high quality low temperature silicon nitride layer | Shulin Wang, Aihua Chen | 2011-07-05 |
| 7967911 | Apparatus and methods for chemical vapor deposition | David K. Carlson, Satheesh Kuppurao | 2011-06-28 |