Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972663 | Method and apparatus for forming a high quality low temperature silicon nitride layer | Errol Antonio C. Sanchez, Aihua Chen | 2011-07-05 |
SW
Shulin Wang
Overall (2011): #165,017 of 364,097Top 50%
1
Patents 2011