Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972663 | Method and apparatus for forming a high quality low temperature silicon nitride layer | Shulin Wang, Errol Antonio C. Sanchez | 2011-07-05 |
AC
Aihua Chen
Overall (2011): #360,908 of 364,097Top 100%
1
Patents 2011