Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8020427 | Methods and apparatus for insitu analysis of gases in electronic device fabrication systems | David K. Carlson | 2011-09-20 |
| 7976634 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Howard Beckford, Herman Diniz, Kailash Kiran Patalay, Brian H. Burrows +4 more | 2011-07-12 |
| 7967911 | Apparatus and methods for chemical vapor deposition | David K. Carlson, Errol Antonio C. Sanchez | 2011-06-28 |
| 7955646 | Elimination of flow and pressure gradients in low utilization processes | James P. Cruse, Andreas Hegedus | 2011-06-07 |