Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7976634 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Satheesh Kuppurao, Howard Beckford, Herman Diniz, Brian H. Burrows +4 more | 2011-07-12 |
| 7964038 | Apparatus for improved azimuthal thermal uniformity of a substrate | Jean R. Vatus, Dean Berlin | 2011-06-21 |