Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964038 | Apparatus for improved azimuthal thermal uniformity of a substrate | Kailash Kiran Patalay, Jean R. Vatus | 2011-06-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964038 | Apparatus for improved azimuthal thermal uniformity of a substrate | Kailash Kiran Patalay, Jean R. Vatus | 2011-06-21 |