Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070408 | Load lock chamber for large area substrate processing system | Shinichi Kurita, Makoto Inagawa, Suhail Anwar | 2011-12-06 |
| 8056500 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Agus Sofian Tjandra, Robert Navasca +3 more | 2011-11-15 |
| 7972441 | Thermal oxidation of silicon using ozone | Yoshitaka Yokota, Sundar Ramamurthy, Vedapuram S. Achutharaman, Cory Czarnik, Christopher S. Olsen | 2011-07-05 |