Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070408 | Load lock chamber for large area substrate processing system | Mehran Behdjat, Shinichi Kurita, Suhail Anwar | 2011-12-06 |
| 7879210 | Partially suspended rolling magnetron | Akihiro Hosokawa, John M. White | 2011-02-01 |