Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083853 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2011-12-27 |
| 8070408 | Load lock chamber for large area substrate processing system | Mehran Behdjat, Shinichi Kurita, Makoto Inagawa | 2011-12-06 |
| 8061949 | Multiple slot load lock chamber and method of operation | Shinichi Kurita, Jae-Chull Lee | 2011-11-22 |
| 8033245 | Substrate support bushing | Shinichi Kurita, Toshio Kiyotake | 2011-10-11 |