Issued Patents 2011
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083853 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2011-12-27 |
| 8070408 | Load lock chamber for large area substrate processing system | Mehran Behdjat, Makoto Inagawa, Suhail Anwar | 2011-12-06 |
| 8061949 | Multiple slot load lock chamber and method of operation | Suhail Anwar, Jae-Chull Lee | 2011-11-22 |
| 8033245 | Substrate support bushing | Suhail Anwar, Toshio Kiyotake | 2011-10-11 |
| 8033772 | Transfer chamber for vacuum processing system | Emanuel Beer, Hung T. Nguyen, Wendell T. Blonigan | 2011-10-11 |
| 7988129 | Floating slit valve for transfer chamber interface | John M. White, Takayuki Matsumoto | 2011-08-02 |
| 7982266 | Dielectric material separated-type, high breakdown voltage semiconductor circuit device, and production method thereof | Atsuo Watanabe, Mitsutoshi Honda, Norio Ishitsuka, Masahiro Ito, Toshihito Tabata +1 more | 2011-07-19 |
| 7976635 | Dual substrate loadlock process equipment | Wendell T. Blonigan, Akihiro Hosokawa | 2011-07-12 |
| 7973546 | In-line electron beam test system | Fayez E. Abboud, Sriram Krishnaswami, Benjamin M. Johnston, Hung T. Nguyen, Matthias Brunner +3 more | 2011-07-05 |
| 7923057 | Methods and apparatus for reducing irregularities in color filters | Bassam Shamoun | 2011-04-12 |
| 7919972 | Integrated substrate transfer module | Emanuel Beer, Hung T. Nguyen, Benjamin M. Johnston, Fayez E. Abboud | 2011-04-05 |