Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062717 | RF current return path for a large area substrate plasma reactor | Ernst Keller, Carl A. Sorensen | 2011-11-22 |
| 8033772 | Transfer chamber for vacuum processing system | Shinichi Kurita, Emanuel Beer, Hung T. Nguyen | 2011-10-11 |
| 7976635 | Dual substrate loadlock process equipment | Shinichi Kurita, Akihiro Hosokawa | 2011-07-12 |
| 7959987 | Fuel cell conditioning layer | Tae Kyung Won, Robert Z. Bachrach, John M. White | 2011-06-14 |