Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075690 | Diffuser gravity support | John M. White, Robin L. Tiner, Jiri Kucera, Soo Young Choi, Beom Soo Park +1 more | 2011-12-13 |
| 8062717 | RF current return path for a large area substrate plasma reactor | Wendell T. Blonigan, Carl A. Sorensen | 2011-11-22 |