Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075734 | Remote inductively coupled plasma source for CVD chamber cleaning | Jozef Kudela | 2011-12-13 |
| 8062717 | RF current return path for a large area substrate plasma reactor | Wendell T. Blonigan, Ernst Keller | 2011-11-22 |
| 8004293 | Plasma processing chamber with ground member integrity indicator and method for using the same | John M. White | 2011-08-23 |