Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075734 | Remote inductively coupled plasma source for CVD chamber cleaning | Carl A. Sorensen | 2011-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075734 | Remote inductively coupled plasma source for CVD chamber cleaning | Carl A. Sorensen | 2011-12-13 |