Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083853 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2011-12-27 |
| D650818 | Inner lift pin | — | 2011-12-20 |
| 8074599 | Plasma uniformity control by gas diffuser curvature | Soo Young Choi, Beom Soo Park, John M. White | 2011-12-13 |
| 8075690 | Diffuser gravity support | Ernst Keller, John M. White, Jiri Kucera, Soo Young Choi, Beom Soo Park +1 more | 2011-12-13 |
| D640715 | Lift pin assembly | — | 2011-06-28 |
| D635597 | Lift pin | — | 2011-04-05 |