Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083853 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Li Hou, Ki Woon Kim, Shinichi Kurita +4 more | 2011-12-27 |
| 8002896 | Shadow frame with cross beam for semiconductor equipment | Sakae Tanaka, Sanjay Yadav, Quanyuan Shang, William Harshbarger | 2011-08-23 |