Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083853 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Shinichi Kurita +4 more | 2011-12-27 |
KK
Ki Woon Kim
Overall (2011): #242,824 of 364,097Top 70%
1
Patents 2011