Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8033772 | Transfer chamber for vacuum processing system | Shinichi Kurita, Hung T. Nguyen, Wendell T. Blonigan | 2011-10-11 |
| 7919972 | Integrated substrate transfer module | Shinichi Kurita, Hung T. Nguyen, Benjamin M. Johnston, Fayez E. Abboud | 2011-04-05 |