Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7973546 | In-line electron beam test system | Sriram Krishnaswami, Benjamin M. Johnston, Hung T. Nguyen, Matthias Brunner, Ralf Schmid +3 more | 2011-07-05 |
| 7919972 | Integrated substrate transfer module | Shinichi Kurita, Emanuel Beer, Hung T. Nguyen, Benjamin M. Johnston | 2011-04-05 |