Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8033772 | Transfer chamber for vacuum processing system | Shinichi Kurita, Emanuel Beer, Wendell T. Blonigan | 2011-10-11 |
| 7973546 | In-line electron beam test system | Fayez E. Abboud, Sriram Krishnaswami, Benjamin M. Johnston, Matthias Brunner, Ralf Schmid +3 more | 2011-07-05 |
| 7919972 | Integrated substrate transfer module | Shinichi Kurita, Emanuel Beer, Benjamin M. Johnston, Fayez E. Abboud | 2011-04-05 |