Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7976635 | Dual substrate loadlock process equipment | Shinichi Kurita, Wendell T. Blonigan | 2011-07-12 |
| 7879210 | Partially suspended rolling magnetron | Makoto Inagawa, John M. White | 2011-02-01 |