Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057601 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Blake Koelmel, Alexander Lerner, Joseph M. Ranish, Kedarnath Sangam | 2011-11-15 |
| 8057602 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Blake Koelmel, Alexander Lerner, Joseph M. Ranish, Kedarnath Sangam | 2011-11-15 |