Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057602 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Blake Koelmel, Alexander Lerner, Kedarnath Sangam, Khurshed Sorabji | 2011-11-15 |
| 8057601 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Blake Koelmel, Alexander Lerner, Kedarnath Sangam, Khurshed Sorabji | 2011-11-15 |
| 7985945 | Method for reducing stray light in a rapid thermal processing chamber by polarization | Blake Koelmel, Aaron Muir Hunter | 2011-07-26 |
| 7978964 | Substrate processing chamber with dielectric barrier discharge lamp assembly | Kaushal K. Singh, Bruce E. Adams | 2011-07-12 |
| 7933009 | Method and apparatus for verifying proper substrate positioning | Oleg V. Serebryanov, Alexander Lerner, Aaron Muir Hunter | 2011-04-26 |
| 7923933 | Lamp failure detector | Oleg V. Serebryanov, Alexander Goldin | 2011-04-12 |
| 7906402 | Compensation techniques for substrate heating processes | Bruce E. Adams | 2011-03-15 |
| 7867868 | Absorber layer candidates and techniques for application | Bruce E. Adams | 2011-01-11 |