Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7978964 | Substrate processing chamber with dielectric barrier discharge lamp assembly | Joseph M. Ranish, Kaushal K. Singh | 2011-07-12 |
| 7906402 | Compensation techniques for substrate heating processes | Joseph M. Ranish | 2011-03-15 |
| 7867868 | Absorber layer candidates and techniques for application | Joseph M. Ranish | 2011-01-11 |