Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985945 | Method for reducing stray light in a rapid thermal processing chamber by polarization | Blake Koelmel, Joseph M. Ranish | 2011-07-26 |
| 7933009 | Method and apparatus for verifying proper substrate positioning | Oleg V. Serebryanov, Alexander Lerner, Joseph M. Ranish | 2011-04-26 |