Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057601 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Alexander Lerner, Joseph M. Ranish, Kedarnath Sangam, Khurshed Sorabji | 2011-11-15 |
| 8057602 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Alexander Lerner, Joseph M. Ranish, Kedarnath Sangam, Khurshed Sorabji | 2011-11-15 |
| 7985945 | Method for reducing stray light in a rapid thermal processing chamber by polarization | Joseph M. Ranish, Aaron Muir Hunter | 2011-07-26 |
| 7923280 | Millisecond annealing (DSA) edge protection | Robert C. McIntosh, David D L Larmagnac, Alexander Lerner, Abhilash J. Mayur, Joseph Yudovsky | 2011-04-12 |