Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8056500 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Agus Sofian Tjandra, Robert Navasca +3 more | 2011-11-15 |
| 8057601 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Blake Koelmel, Alexander Lerner, Joseph M. Ranish, Khurshed Sorabji | 2011-11-15 |
| 8057602 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Blake Koelmel, Alexander Lerner, Joseph M. Ranish, Khurshed Sorabji | 2011-11-15 |