Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7962990 | Brush box cleaner module with force control | Hui Chen, Allen L. D'Ambra | 2011-06-21 |
| 7921803 | Chamber components with increased pyrometry visibility | Brendan McDougall, Ravi Jallepally, Yi-Chiau Huang, Maitreyee Mahajani, Kevin Griffin +1 more | 2011-04-12 |
| 7923280 | Millisecond annealing (DSA) edge protection | Blake Koelmel, Robert C. McIntosh, David D L Larmagnac, Alexander Lerner, Abhilash J. Mayur | 2011-04-12 |
| 7900311 | Wafer edge cleaning | Anne-Douce Coulin, Leon Volfovski | 2011-03-08 |