Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7988535 | Platen exhaust for chemical mechanical polishing system | Hung Chih Chen, Donald Olgado | 2011-08-02 |
| 7962990 | Brush box cleaner module with force control | Hui Chen, Joseph Yudovsky | 2011-06-21 |