Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066551 | Retaining ring with shaped surface | Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2011-11-29 |
| 8021211 | Substrate holder with liquid supporting surface | Yin Yuan, Stephen Jew | 2011-09-20 |
| 7988535 | Platen exhaust for chemical mechanical polishing system | Allen L. D'Ambra, Donald Olgado | 2011-08-02 |
| 7963826 | Apparatus and methods for conditioning a polishing pad | Roy C. Nangoy, Shou-Sung Chang, Donald Olgado, Gerald Alonzo | 2011-06-21 |
| 7927190 | Retaining ring with shaped surface | Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2011-04-19 |
| 7883397 | Substrate retainer | Steven M. Zuniga | 2011-02-08 |