Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066551 | Retaining ring with shaped surface | Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2011-11-29 |
| 8029640 | Multilayer retaining ring for chemical mechanical polishing | Thomas H. Osterheld | 2011-10-04 |
| 8021215 | Carrier head with retaining ring and carrier ring | Andrew J. Nagengast, Jeonghoon Oh | 2011-09-20 |
| 7950985 | Flexible membrane for carrier head | Andrew J. Nagengast, Jeonghoon Oh | 2011-05-31 |
| 7927190 | Retaining ring with shaped surface | Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2011-04-19 |
| 7901273 | Carrier ring for carrier head | Andrew J. Nagengast, Jeonghoon Oh | 2011-03-08 |
| 7883397 | Substrate retainer | Hung Chih Chen | 2011-02-08 |