Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021215 | Carrier head with retaining ring and carrier ring | Steven M. Zuniga, Jeonghoon Oh | 2011-09-20 |
| 7950985 | Flexible membrane for carrier head | Steven M. Zuniga, Jeonghoon Oh | 2011-05-31 |
| 7901273 | Carrier ring for carrier head | Steven M. Zuniga, Jeonghoon Oh | 2011-03-08 |