Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066551 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2011-11-29 |
| 8033895 | Retaining ring with shaped profile | Gopalakrishna B. Prabhu, Yin Yuan, Gregory E. Menk | 2011-10-11 |
| 8021215 | Carrier head with retaining ring and carrier ring | Steven M. Zuniga, Andrew J. Nagengast | 2011-09-20 |
| 7950985 | Flexible membrane for carrier head | Steven M. Zuniga, Andrew J. Nagengast | 2011-05-31 |
| 7927190 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2011-04-19 |
| 7901273 | Carrier ring for carrier head | Steven M. Zuniga, Andrew J. Nagengast | 2011-03-08 |