Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070909 | Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles | Arulkumar Shanmugasundram, Alexander T. Schwarm | 2011-12-06 |
| 8033895 | Retaining ring with shaped profile | Yin Yuan, Jeonghoon Oh, Gregory E. Menk | 2011-10-11 |
| 7908743 | Method for forming an electrical connection | Zhiyong Li, Chuck Luu, Danny Cam Toan Lu, Garry K. Kwong, David Tanner | 2011-03-22 |