Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070909 | Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles | Alexander T. Schwarm, Gopalakrishna B. Prabhu | 2011-12-06 |
| 8005634 | Copper wiring module control | Suketu Arun Parikh | 2011-08-23 |
| 7970588 | Method, system and medium for controlling manufacturing process using adaptive models based on empirical data | Yuri Kokotov, Alexander T. Schwarm, Efim Entin, Jacques Seror, Jehuda Hartman +2 more | 2011-06-28 |
| 7966087 | Method, system and medium for controlling manufacture process having multivariate input parameters | Yuri Kokotov, Efim Entin, Jacques Seror, Yossi Fisher, Shalomo Sarel +2 more | 2011-06-21 |
| 7910476 | Adhesion and minimizing oxidation on electroless CO alloy films for integration with low K inter-metal dielectric and etch stop | Hongbin Fang, Timothy Weidman, Fang Mei, Yaxin Wang, Christopher Dennis Bencher +1 more | 2011-03-22 |