Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084310 | Self-aligned multi-patterning for advanced critical dimension contacts | Bencherki Mebarki, Li Yan Miao, Jen Shu | 2011-12-27 |
| 7989366 | Dopant activation in doped semiconductor substrates | Jeffrey C. Munro, Srinivas D. Nemani, Young S. Lee, Marlon Edward Menezes, Vijay Parihar | 2011-08-02 |
| 7968473 | Low temperature process for depositing a high extinction coefficient non-peeling optical absorber for a scanning laser surface anneal of implanted dopants | Vijay Parihar, Rajesh Kanuri, Marlon Edward Menezes | 2011-06-28 |
| 7910476 | Adhesion and minimizing oxidation on electroless CO alloy films for integration with low K inter-metal dielectric and etch stop | Hongbin Fang, Timothy Weidman, Fang Mei, Yaxin Wang, Arulkumar Shanmugasundram +1 more | 2011-03-22 |
| 7901869 | Double patterning with a double layer cap on carbonaceous hardmask | Huixiong Dai | 2011-03-08 |