Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989366 | Dopant activation in doped semiconductor substrates | Jeffrey C. Munro, Young S. Lee, Marlon Edward Menezes, Christopher Dennis Bencher, Vijay Parihar | 2011-08-02 |
| 7943531 | Methods for forming a silicon oxide layer over a substrate | Abhijit Basu Mallick, Ellie Yieh | 2011-05-17 |
| 7902080 | Deposition-plasma cure cycle process to enhance film quality of silicon dioxide | Xiaolin Chen, Shankar Venkataraman | 2011-03-08 |
| 7867923 | High quality silicon oxide films by remote plasma CVD from disilane precursors | Abhijit Basu Mallick, Ellie Yieh | 2011-01-11 |