Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7943531 | Methods for forming a silicon oxide layer over a substrate | Srinivas D. Nemani, Ellie Yieh | 2011-05-17 |
| 7867923 | High quality silicon oxide films by remote plasma CVD from disilane precursors | Srinivas D. Nemani, Ellie Yieh | 2011-01-11 |