Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012887 | Precursor addition to silicon oxide CVD for improved low temperature gapfill | Hiroshi Hamana, Manuel A. Hernandez, Nitin K. Ingle, Paul Edward Gee | 2011-09-06 |
| 7994019 | Silicon-ozone CVD with reduced pattern loading using incubation period deposition | Sasha Kweskin, Paul Edward Gee, Kedar Sapre | 2011-08-09 |
| 7960294 | Method of modifying interlayer adhesion | Francimar Schmitt, Li-Qun Xia, Son V. Nguyen | 2011-06-14 |
| 7935643 | Stress management for tensile films | Jingmei Liang, Anjana M. Patel, Nitin K. Ingle | 2011-05-03 |
| 7902080 | Deposition-plasma cure cycle process to enhance film quality of silicon dioxide | Xiaolin Chen, Srinivas D. Nemani | 2011-03-08 |