Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012887 | Precursor addition to silicon oxide CVD for improved low temperature gapfill | Shankar Venkataraman, Hiroshi Hamana, Manuel A. Hernandez, Nitin K. Ingle | 2011-09-06 |
| 7994019 | Silicon-ozone CVD with reduced pattern loading using incubation period deposition | Sasha Kweskin, Shankar Venkataraman, Kedar Sapre | 2011-08-09 |