Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012887 | Precursor addition to silicon oxide CVD for improved low temperature gapfill | Shankar Venkataraman, Manuel A. Hernandez, Nitin K. Ingle, Paul Edward Gee | 2011-09-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012887 | Precursor addition to silicon oxide CVD for improved low temperature gapfill | Shankar Venkataraman, Manuel A. Hernandez, Nitin K. Ingle, Paul Edward Gee | 2011-09-06 |