Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960294 | Method of modifying interlayer adhesion | Li-Qun Xia, Son V. Nguyen, Shankar Venkataraman | 2011-06-14 |
| 7910897 | Process and apparatus for post deposition treatment of low dielectric materials | — | 2011-03-22 |