Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084310 | Self-aligned multi-patterning for advanced critical dimension contacts | Bencherki Mebarki, Christopher Dennis Bencher, Jen Shu | 2011-12-27 |
| 7972959 | Self aligned double patterning flow with non-sacrificial features | Bencherki Mebarki, Kenlin Huang | 2011-07-05 |