Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070909 | Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles | Arulkumar Shanmugasundram, Gopalakrishna B. Prabhu | 2011-12-06 |
| 8010321 | Metrics independent and recipe independent fault classes | Y. Sean Lin, William Clements | 2011-08-30 |
| 7970588 | Method, system and medium for controlling manufacturing process using adaptive models based on empirical data | Yuri Kokotov, Efim Entin, Jacques Seror, Jehuda Hartman, Yossi Fisher +2 more | 2011-06-28 |
| 7966087 | Method, system and medium for controlling manufacture process having multivariate input parameters | Yuri Kokotov, Efim Entin, Jacques Seror, Yossi Fisher, Shalomo Sarel +2 more | 2011-06-21 |
| 7962864 | Stage yield prediction | Youval Nehmadi, Rinat Shimshi, Vicky Svidenko, Sundar Jawaharlal | 2011-06-14 |
| 7937179 | Dynamic inline yield analysis and prediction of a defect limited yield using inline inspection defects | Rinat Shimshi, Youval Nehmadi, Vicky Svidenko, Sundar Jawaharlal | 2011-05-03 |
| 7934125 | Ranged fault signatures for fault diagnosis | Jerry Harvey | 2011-04-26 |