Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8033895 | Retaining ring with shaped profile | Gopalakrishna B. Prabhu, Jeonghoon Oh, Gregory E. Menk | 2011-10-11 |
| 8021211 | Substrate holder with liquid supporting surface | Hung Chih Chen, Stephen Jew | 2011-09-20 |